Model Controller XM-1500 Head XM-C1000 Head base monitor section XM-M1200 Head base movable stage section XM-S1200 Camera Probe Stage Marker XM-T1200 Image sensor 4 million pixels CMOS Measurement range 600*300*200(mm) Minimum display unit 1㎛ Measurement accuracy　Repeatability　When stage is locked　　　　　　　　　　±3㎛ 　　　　　　Repeatability　When stage is unlocked　±4㎛ Indication error When stage is locked ±8㎛ Indication error When stage is unlocked ± (10 L/100)㎛ Stage section load capacity 25kg 　　　　　　　X-axis movable range　±100mm Rotation range ±60° Number of probes 2 ✤If there is a discrepancy between the specifications and the actual product, priority will be given to the actual product.