Specifications and Inspection Results (Standards) ◆Travel Range: X 152, Y 152mm (X 150, Y 150mm) ◆Maximum Speed: X 30, Y 30mm/s (X 30, Y 30mm/s) ◆Motor Feed Accuracy: X 0.3μm, -2.5μm (±7μm) Y 0.1μm, -1.7μm (±7μm) ◆Motor Feed Reproducibility: X 1.7μm p-v (6μm p-v) Y 1.7μm p-v (6μm p-v) ◆Correction Value: X 0.10000767, Y 0.10000193 ◆Platform flatness: 6μm (50μm/movable range) ◆XY axis orthogonality: 2.0" (60") ◆Z axis orthogonality: X 15" (30"), Y 3" (30") ◆Scale error: X 0.2μm, -0.3μm (±2.6μm/movable range) 　　　　　　 Y 0.4μm, -0.2μm (±2.6μm/movable range) ◆Scale repeatability: X 0.2μm p-v (3μm p-v) 　　　　　　　 　　Y 0.1μm p-v (3μm p-v) ◆Correction value: X 0.10000447, Y 0.10000193 ✤In case of discrepancies between specifications and the actual product, the actual product will take precedence.